Metallic Seals
HELICOFLEX®
HELICOFLEX® Seal is used in an extreme environment such as cryogenic, high temperature, ultrahigh pressure and high vacuum, which is impossible in an existing seals, and has an excellent sealing force even when a flange is deformed by pressure and temperature change by the action of a Helical Spring contained in an O-ring. Among Metal Seals, HELICOFLEX® Seal has the best sealing power, vacuum, and sealing level along with Ultra-Flex Seal. In particular, it provides a solution to problems such as corrosion and oxidation caused by fluorine gas in the field of semiconductors and displays.
Metallic Seals
U-Tight Seal
The U-TIGHTTSEAL® is a metal gasket with a built-in elastic core (coil and spring).
U-TIGHTTSEAL® is a metal material and exhibits rubber-like properties due to its excellent compression and restoration properties. The shape is a ring with a circular cross-section, and the structure has a closely wound elastic core at the center, consisting of one to two layers of sheath covering it. The outer sheath is made of flexible metal that is easy to handle, and for the second layer, the inner sheath is made of a relatively hard material.
Gasket
Copper Gasket
OFCU (oxygen free high conductivity) copper is used to manufacture gasket to seal UHV between two conflat flanges. The purity is higher than 99.97% and the hardness is 60-80HV. The gasket is clean, easily be formed to shape, has a wide temperature range and low outgassing rate.
Vacuum Product
Gate valve
A terminal for electrical connection between the inside and outside of the vacuum chamber.
It uses ceramic and metal bonding technology and has high airtightness.
Stage
Stage
"High-precision stages are positional equipment that is ideal for atmospheric, high-vacuum and ultra-high-vacuum environments while providing both accuracy and durability.
The core of vacuum is the proper selection of materials, plastics, lubricants, components, etc. with low outgasing, and the material is limited to aluminum stainless steel.
It has developed a custom vacuum compatible solution for synchrotron radiation, semiconductor lithography and space development applications, providing oil-free lubrication in ultra-high vacuum as well as high-precision linear and angular encoders. It is divided into a position stage and a vacuum stage."
DCM
Single Cam DCM
The main rotation axis coincides with the surface plane of the 2nd crystal. Shift of the 1st crystal position with respect to the incident beam, which would be caused by simple rotation of the table around the main axis is compensated by vertical motion of the 1st crystal guided by the cam.