HELICOFLEX® Seal is used in an extreme environment such as cryogenic, high temperature, ultrahigh pressure and high vacuum, which is impossible in an existing seals, and has an excellent sealing force even when a flange is deformed by pressure and temperature change by the action of a Helical Spring contained in an O-ring. Among Metal Seals, HELICOFLEX® Seal has the best sealing power, vacuum, and sealing level along with Ultra-Flex Seal. In particular, it provides a solution to problems such as corrosion and oxidation caused by fluorine gas in the field of semiconductors and displays.
The U-TIGHTTSEAL® is a metal gasket with a built-in elastic core (coil and spring).
U-TIGHTTSEAL® is a metal material and exhibits rubber-like properties due to its excellent compression and restoration properties. The shape is a ring with a circular cross-section, and the structure has a closely wound elastic core at the center, consisting of one to two layers of sheath covering it. The outer sheath is made of flexible metal that is easy to handle, and for the second layer, the inner sheath is made of a relatively hard material.
OFCU (oxygen free high conductivity) copper is used to manufacture gasket to seal UHV between two conflat flanges. The purity is higher than 99.97% and the hardness is 60-80HV. The gasket is clean, easily be formed to shape, has a wide temperature range and low outgassing rate.
A terminal for electrical connection between the inside and outside of the vacuum chamber.
It uses ceramic and metal bonding technology and has high airtightness.
6-axis Helium-free Cryogenic Manipulator
The 6-axis Helium-free Cryogenic Manipulator provided by Fermi Instruments can realize precise control of sample position and angle.
6-axis means that the sample stage can be moved in the X, Y, and Z directions, and can realize polar rotation R1 (around Z axis), flip rotation R2 (tilt), and in-plane rotation R3 (azimuth).
The movement of X/Y/Z/R1 are realized by the XYZ-R1 stage, R2 and R3 are realized by the gear transmission structure of the sample stage.
5.5-axis Helium-free Cryogenic Manipulator
The 5.5-axis Helium-free Cryogenic Manipulator provided by Fermi Instruments can realize precise control of sample position and angle.
5.5-axis means that the sample stage can be moved in the X, Y, and Z directions, and can realize polar rotation R1 (around Z axis), flip rotation R2 (tilt), and in-plane rotation R3 (azimuth),