Metallic Seals
HELICOFLEX®
HELICOFLEX® Seal is used in an extreme environment such as cryogenic, high temperature, ultrahigh pressure and high vacuum, which is impossible in an existing seals, and has an excellent sealing force even when a flange is deformed by pressure and temperature change by the action of a Helical Spring contained in an O-ring. Among Metal Seals, HELICOFLEX® Seal has the best sealing power, vacuum, and sealing level along with Ultra-Flex Seal. In particular, it provides a solution to problems such as corrosion and oxidation caused by fluorine gas in the field of semiconductors and displays.
Metallic Seals
U-Tight Seal
The U-TIGHTTSEAL® is a metal gasket with a built-in elastic core (coil and spring).
U-TIGHTTSEAL® is a metal material and exhibits rubber-like properties due to its excellent compression and restoration properties. The shape is a ring with a circular cross-section, and the structure has a closely wound elastic core at the center, consisting of one to two layers of sheath covering it. The outer sheath is made of flexible metal that is easy to handle, and for the second layer, the inner sheath is made of a relatively hard material.
Gasket
Copper Gasket
OFCU (oxygen free high conductivity) copper is used to manufacture gasket to seal UHV between two conflat flanges. The purity is higher than 99.97% and the hardness is 60-80HV. The gasket is clean, easily be formed to shape, has a wide temperature range and low outgassing rate.