Stage

Stage

• "High-precision stages are positional equipment that is ideal for atmospheric, high-vacuum and ultra-high-vacuum environments while providing both accuracy and durability.
• The core of vacuum is the proper selection of materials, plastics, lubricants, components, etc. with low outgasing, and the material is limited to aluminum stainless steel.
• It has developed a custom vacuum compatible solution for synchrotron radiation, semiconductor lithography and space development applications, providing oil-free lubrication in ultra-high vacuum as well as high-precision linear and angular encoders. It is divided into a position stage and a vacuum stage."