"High-precision stages are positional equipment that is ideal for atmospheric, high-vacuum and ultra-high-vacuum environments while providing both accuracy and durability.
The core of vacuum is the proper selection of materials, plastics, lubricants, components, etc. with low outgasing, and the material is limited to aluminum stainless steel.
It has developed a custom vacuum compatible solution for synchrotron radiation, semiconductor lithography and space development applications, providing oil-free lubrication in ultra-high vacuum as well as high-precision linear and angular encoders. It is divided into a position stage and a vacuum stage."
Single Cam DCM
The main rotation axis coincides with the surface plane of the 2nd crystal. Shift of the 1st crystal position with respect to the incident beam, which would be caused by simple rotation of the table around the main axis is compensated by vertical motion of the 1st crystal guided by the cam.