UV light source
Multi-gas Vacuum UV Light Source for Mass Spectrometry (BL-1030S)
RF Plasma Source
FERMI-RFPS-200
Plasma component
Integrated Multi-filter Fast Switch
Plasma component
High Purity Air Pavement
RF Plasma Source
Remote low temperature plasma processor
UV light source
Multi-Gas and monochromatic VUV Source (BL1100S)