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Products

Plasma component

High Purity Air Pavement

SPECS

Product Overview

 

The Multi-air Pavement to provide a high purity UV light source working gas superior to 100ppt, including He, Ne, Ar, Kr, Xe... and other gases, improve photon resolution, extend the life span of the lampholder.

 

Specification

 

Precision Gas Flow Control: 0.1sccm-10sccm

Purity: After purification, the purity of the gas is better than 100ppt

Multiple gas switching

All-metal VCR ultra-high purity gas path standard design

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