
UV light source
Multi-gas Vacuum UV Light Source for Mass Spectrometry (BL-1030S)

RF Plasma Source
FERMI-RFPS-200

Plasma component
Integrated Multi-filter Fast Switch

Plasma component
High Purity Air Pavement

RF Plasma Source
Remote low temperature plasma processor

UV light source
Multi-Gas and monochromatic VUV Source (BL1100S)