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Products

Plasma component

High Purity Air Pavement

SPECS

Product Overview

 

The Multi-air Pavement to provide a high purity UV light source working gas superior to 100ppt, including He, Ne, Ar, Kr, Xe... and other gases, improve photon resolution, extend the life span of the lampholder.

 

Specification

 

● Precision Gas Flow Control: 0.1sccm-10sccm

● Purity: After purification, the purity of the gas is better than 100ppt

● Multiple gas switching

● All-metal VCR ultra-high purity gas path standard design

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