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Products

RHEED Unit

RHEED

  • 반사 고에너지 전자 회절장비인 RHEED(Reflection High-Energy Electron Diffraction)는 CF 1.33"플랜지의 마운트와 소형 사이즈의 전자총 구성되어 있습니다.
  • 컴팩트한 전자총으로 인해 손쉬운 유지 관리가 가능하며, 높은 압력조건이나 전자빔의 스캔 평면의 샘플 관찰 시 다른 옵션장치의 병렬조작이 가능하도록 해줍니다
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SPECS

○ Feature

 

 

* 200 deg C bakable for UHV
* Compact HV power supply : up to 30 kV
* Single differential pumping : up to 1Pa
* Double-stage differential pumping (option) for high-pressure : up to 100Pa
* Electron-beam parallel scanning (option) : Multiple diffraction monitor at same condition
 
○ Specication

 

 

* Electron-gun

Acceleration voltage 30 kV max (25 kV rated).
Filament Tungsten (W), hair-pin shape.
Electron beam diameter Phi 0.5 mm
Deflection XY-axes by coil
Baking 200 deg C bakable
Dimension / Mount L 310 mm, phi 43 mm / CF1.33" (ICF34) mount
Differential pumping port CF1.33" (ICF34)

* High-voltage power supply

Output high-voltage 0-30 kV
Stability Less than 0.5 %
Remote control All parameters for e-gun operation by handy console
Dimension W480 mm x D400 mm x H150 mm (JIS rack mount)
Power inlet AC 100V, 1-phase

* Fluorescent screen                                                    Specifications are subject to change for improvement without notice

Screen CF6" (ICF152) or CF8" (ICF203) mount with shutter

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Catalog RHEED unit

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