메뉴 바로가기
주메뉴 바로가기
컨텐츠 바로가기

Products

Gas Powder Trap

COMBI TRAP

  • POWDER ZERO - POWDER TRAP
  • RE100 [Renewable Electricity 100%]
  • NO PCW, NO ELECTRIC
  • Volume : 32L ~ 115L
  • FILTER TYPE : ELEMENT + COIL FILTER
Consultation Inquiry

SPECS


TYPE MODEL VOLUME SIZE FLANGE
COIL + ELEMENT TU-1500J
TU-3100J
TU-4100J
TU-5100J		 32 LITER
70 LITER
86 LITER
115 LITER		 ∅370 x H707
∅400 x H1013
∅440 x H1064
∅485 x H1064		 NW40, NW50

                                                                                      

MATERIAL WEIGHT PROCESS SET-UP PLACE CAPTURED AMOUNT
SUS304 65 KG
100 KG
147 KG
157 KG		 CVD, ETCH, METAL VACUUM LINE
EXHAUST LINE		 MAX 30KG
MAX 50KG


GAS UTILITY
WF6, SiH4, C3F8 PCW

DOWNLOAD

Catalog Powder Trap

DOWNLOAD