Gas Powder Trap
COMBI TRAP
SPECS
TYPE | MODEL | VOLUME | SIZE | FLANGE |
COIL + ELEMENT | TU-1500J TU-3100J |
32 LITER 70 LITER |
∅370 x H707 ∅400 x H1013 |
NW40, NW50 |
MATERIAL | WEIGHT | PROCESS | SET-UP PLACE | CAPTURED AMOUNT |
SUS304 | 60 KG 100 KG |
CVD, ETCH | VACUUM LINE EXHAUST LINE |
MAX 30KG MAX 50KG |
GAS | UTILITY |
|
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PH3 | PCW |
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Catalog Powder Trap