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Products

Gas Powder Trap

ELEMENT TRAP

  • POWDER ZERO - POWDER TRAP
  • RE100 [Renewable Electricity 100%]
  • NO PCW, NO ELECTRIC
  • Volume : 4L ~ 7L
  • FILTER TYPE : ELEMENT
Consultation Inquiry

SPECS

 

FILTER TYPE MODEL VOLUME SIZE WEIGHT
ELEMENT TU-250V
TU-500V		 4 LITER
7 LITER		 ∅210 x H295
∅300 x H270		 6 KG
8 KG

                                                                                      

MATERIAL FLANGE PROCESS SET-UP PLACE GAS
SUS304 NW40, NW50 IMP, ETCH, ALD VACUUM LINE
 PH3, BF3, AsH3, GeH4



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Catalog Powder Trap

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