Gas Powder Trap
ELEMENT TRAP
SPECS
TYPE | MODEL | VOLUME | SIZE | FLANGE |
ELEMENT | TU-250V TU-500V |
4 LITER 7 LITER |
∅210 x H295 ∅300 x H270 |
NW40, NW50 |
MATERIAL | WEIGHT | PROCESS | SET-UP PLACE | CAPTURED AMOUNT |
SUS304 | 6 KG 8 KG |
IMP, ETCH, ALD | VACUUM LINE EXHAUST LINE |
MAX 1KG MAX 1.5KG |
GAS | UTILITY | |||
PH3 | - |
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Catalog Powder Trap