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Products

Gas Powder Trap

COIL TRAP

  • POWDER ZERO - POWDER TRAP
  • RE100 [Renewable Electricity 100%]
  • NO PCW, NO ELECTRIC
  • Volume : 14L ~ 171L
  • FILTER TYPE : COIL
Consultation Inquiry

SPECS


FILTER TYPE MODEL VOLUME SIZE WEIGHT
COIL TU-26LM
TU-65LMJ
TU-85LMJ
TU-95LMJ
TU-105LMJ		 14 LITER
70 LITER
86 LITER
115 LITER
171 LITER		 ∅330 x H321
∅370 x H707
∅400 x H1013
∅440 x H1064
∅485 x H1064		 20 KG
99 KG
115 KG
160 KG
220 KG

                                                                                      

MATERIAL FLANGE PROCESS SET-UP PLACE GAS
SUS304 NW40, NW50 CVD, ETCH, METAL VACUUM LINE
EXHAUST LINE		 WF6, SiH4, C3F8

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