Gas Powder Trap
COIL TRAP
SPECS
TYPE | MODEL | VOLUME | SIZE | FLANGE |
COIL | TU-65LMJ TU-95LMJ |
70 LITER 115 LITER |
∅400xH1013 ∅485xH1064 |
NW40, NW50 |
MATERIAL | WEIGHT | PROCESS | SET-UP PLACE | CAPTURED AMOUNT |
SUS304 | 100 KG 130 KG |
CVD, ETCH | VACUUM LINE EXHAUST LINE |
MAX 50KG MAX 70KG |
GAS | UTILITY |
|
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PH3 | PCW |
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Catalog Powder Trap