Products
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Gas Powder Trap
COMBI TRAP
- POWDER ZERO - POWDER TRAP
- RE100 [Renewable Electricity 100%]
- NO PCW, NO ELECTRIC
- Volume : 32L ~ 115L
- FILTER TYPE : ELEMENT + COIL FILTER
SPECS
| TYPE | MODEL | VOLUME | SIZE | FLANGE |
| COIL + ELEMENT | TU-1500J TU-3100J |
32 LITER 70 LITER |
∅370 x H707 ∅400 x H1013 |
NW40, NW50 |
| MATERIAL | WEIGHT | PROCESS | SET-UP PLACE | CAPTURED AMOUNT |
| SUS304 | 65 KG 100 KG 147 KG 157 KG |
CVD, ETCH | VACUUM LINE EXHAUST LINE |
MAX 30KG MAX 50KG |
| GAS | UTILITY |
|
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| WF6, SiH4, C3F8 | PCW |
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Catalog Powder Trap
- MOTION Hitech Co., Ltd.
- CEO Hunho Lee, Kisung Song
- Address 17, Deokseongsandan 1-ro, Idong-eup, Cheoin-gu, Yongin-si, Gyeonggi-do, Korea 17130
- Tel. 031-335-8760
- Fax. 031-338-8525
- COPYRIGHT(C) MOTION HITECH ALL RIGHT RESERVED